Digital
Digital Flow Regulators
Showing all 6 results
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LF-F/LV-F Series | Digital Liquid Mass Flow Meters – Controllers
The LF-F and LV-F Series are digital liquid mass flow controllers using a Peltier element which cools the liquid rather than using the more common method of thermal heating. This technique removes the risk of boiling chemicals with a low boiling point, thus allowing for greater chemical control.
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SEC-8000 F-D-E Series | High Temperature Digital Mass Flow Controller
The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing.
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SEC-N100 Series | Digital Mass Flow Controller
The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has various types of communications available i.e. digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®. The SEC-N100 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response. This mass flow controller also has multi-gas/multi-range function emphasizing its’ cost reduction capabilities in your process.
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SEC-R100 Series | Digital Mass Flow Controller
The digital mass flow controller SEC-R100 focuses on non-semiconductor applications, where high levels of product performance, quality and integrity are needed, such as vacuum coating, bioreactor, food & beverage, analytical, etc.
With this mass flow controller high accuracy (+/-1.0% S.P.) and performance are achieved without the high cost plus the multi gas/multi range function can be used for the nine most popular gases.
Digital (PROFIBUS)/Analog communications and 24 VDC power supply are available. -
SEC-Z500X | Multi Range/Multi Gas Digital Mass Flow Controller
This is HORIBA’s best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily.
With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available. -
XF-100 Series | Digital Liquid Mass Flow Meters
The digital liquid mass flow meter XF series uses the differential-pressure measurement method to achieve a high-speed response of 100 msec (or less than 0.8 sec when it is used in combination with a piezo valve).