Digital
Digital Flow Regulators
Showing all 7 results
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LF-F/LV-F Series | Digital Liquid Mass Flow Meters – Controllers
The LF-F and LV-F Series are digital liquid mass flow controllers using a Peltier element which cools the liquid rather than using the more common method of thermal heating. This technique removes the risk of boiling chemicals with a low boiling point, thus allowing for greater chemical control.
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Micropole System QL Series
The MICROPOLE system is one of the smallest mass spectrometer systems making it easy to install. The system is proven to be an ideal solution for many chamber characterization applications. The compact size is achieved by the patented design of miniature array of quadrupole mass filters. The system is capable of operating at much higher pressures than traditional systems, so the need for additional differential pumping equipment is reduced.
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SEC-8000 F-D-E Series | High Temperature Digital Mass Flow Controller
The SEC-8000F/D/E series can operate in high temperature environments, from 15 ℃ to 120 ℃, for a variety of tasks including semiconductor and compound semiconductor processing.
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SEC-N100 Series | Digital Mass Flow Controller
The SEC-N100 Series is suitable for a large variety of industries and applications. This mass flow controller can control a wide range of flows: from 10 SCCM to 1000 SLM. The SEC-N100 Series also has various types of communications available i.e. digital/analog, DeviceNet™, CC-Link®, PROFIBUS™, and EtherCAT®. The SEC-N100 Series offers high accuracy (+/- 1.0% S.P. *1) and high-speed response. This mass flow controller also has multi-gas/multi-range function emphasizing its’ cost reduction capabilities in your process.
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SEC-R100 Series | Digital Mass Flow Controller
The digital mass flow controller SEC-R100 focuses on non-semiconductor applications, where high levels of product performance, quality and integrity are needed, such as vacuum coating, bioreactor, food & beverage, analytical, etc.
With this mass flow controller high accuracy (+/-1.0% S.P.) and performance are achieved without the high cost plus the multi gas/multi range function can be used for the nine most popular gases.
Digital (PROFIBUS)/Analog communications and 24 VDC power supply are available. -
SEC-Z500X | Multi Range/Multi Gas Digital Mass Flow Controller
This is HORIBA’s best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily.
With high accuracy +/- 1.0% S.P, piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available. -
XF-100 Series | Digital Liquid Mass Flow Meters
The digital liquid mass flow meter XF series uses the differential-pressure measurement method to achieve a high-speed response of 100 msec (or less than 0.8 sec when it is used in combination with a piezo valve).