Pressure Insensitive
Pressure Independent Regulation Instrumentation
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CRITERION D500 | Pressure Insensitive Mass Flow Module
19,90€ iva esclusa Add to cartThis leading-edge pressure insensitive mass flow module is installed with differential pressure detection and a piezo actuator valve.
The high level of performance provided by the CRITERION D500 ensures it can be used for a range of advanced semiconductor manufacturing processes; pressure insensitive, multi-range/multi-gas/multi-pressure, G-LIFE (Gas Law check of Integrated Flow restrictor Equation) Self-Diagnosis function, high accuracy, fast response, wide range, and all-metal. -
SEC-Z700X Series | Pressure Insensitive Mass Flow Controller
19,90€ iva esclusa Add to cartThe SEC-Z700X Series is equipped with reliable thermal sensors and a pressure insensitive function for stable flow rate control. The on-board pressure measurement reduces the cost, size and complexity of gas delivery systems.
Pressure Insensitive
A new high-performance function provides a simplified gas supply system. Typical multi chamber gas lines have a line regulator, pressure sensor and filter to avoid the mass flow controller crosstalk phenomenon caused by pressure fluctuations. The SEC-Z700X Series demonstrates high stability and controls the gas flow without effecting the upstream and downstream pressure fluctuations. Flow rate output, temperature and pressure readings are provided.
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